Dean Mark J. Kushner

Mark J. Kushner
Professor and Dean

104 Marston Hall
Iowa State University
Ames, IA 50011-2151
Phone: 515 294-9988
Fax: 515 294-9273
Full Vita
Publication List
Research Website




Research Areas
Partially ionized gases (or plasmas)

Education

  • California Institute of Technology, Applied Physics, PhD (1979)
  • California Institute of Technology, Applied Physics, MS (1977)
  • University of California at Los Angeles, Engineering, BS (1976)
  • University of California at Los Angeles, Astronomy, BA (1976)

Academic Positions

Iowa State University

  • Dean, College of Engineering (2005–present)
  • Melsa Professor of Engineering, Department of Electrical and Computer Engineering (2005–present)
  • Affiliate, Department of Materials Science and Engineering/Department of Chemical Engineering (2005–present)

University of Illinois at Urbana-Champaign

  • Founder Professor of Engineering (1999–2004)
  • Professor, Department of Electrical and Computer Engineering (1991–1999)
  • Interim Head, Department of Chemical and Biomolecular Engineering (2002–2004)
  • Interim Head, Department of Electrical and Computer Engineering (2001)
  • Interim Associate Dean of Administrative Affairs, College of Engineering (2000)
  • Assistant Dean of Academic Programs, College of Engineering (1994–1995)
  • Affiliate, Department of Material Science and Engineering/Department of Nuclear Engineering/Department of Mechanical and Industrial Engineering/Department of Chemical and Biomolecular Engineering/Department of Physics (1991–2004)
  • Research Professor, Micro- and Nanotechnology Laboratory (1994–1995)
  • Associate Member, Beckman Institute (1994–1995)
  • Associate Professor, Department of Electrical and Computer Engineering (1988–1991)
  • Assistant Professor, Department of Electrical and Computer Engineering (1986–1988)

California Institute of Technology

  • Weissmann Postdoctoral Research Fellow of Applied Physics (1979–1980)
  • Teaching and Research Assistant, Department of Applied Physics (1976–1979)

Major Honors and Awards

  • Fellow, Institute of Electrical and Electronics Engineers
  • Fellow, American Physical Society
  • Fellow, Optical Society of America
  • Fellow, American Vacuum Society
  • Fellow, Institute of Physics
  • IEEE Plasma Science and Applications Award
  • AVS Plasma Science and Technology Prize
  • Tegal Corporation Thinker Award for Plasma Processing Technology
  • Semiconductor Research Corporation Technical Excellence Award
  • Fellow, Japanese Society for Advancement of Science

Selected Publications

  • Sankaran, A., and M. J. Kushner. 2005. Etching of Porous and Solid SiO2 in Ar/c-C4F8, HYPERLINK "mailto:O@/c-C4F8" O2/c-C4F8 and Ar/O2/c-C4F8 plasmas. J. Appl. Phys. 97:023307.
  • Vasenkov, A. V., X. Li, G. S. Oehrlein, and M. J. Kushner. 2004. Properties of C4F8 inductively coupled plasmas, Part II: Plasma chemistry, reaction mechanism of modeling of Ar/c-C4F8/02 discharges. J. Vac. Sci. Technol. A 22:511.
  • Bhoj, A. N., and M. J. Kushner. 2004. Avalanche processes in an idealized lamp II: Modeling of breakdown in Ar/Xe electric discharges. J. Phys. D 37:2910.
  • Kinder, R., A. R. Ellingboe, and M. J. Kushner. 2003. H- to W-mode transitions and properties of a multimode helicon plasma reactor. Plasma Sources Sci. Technol. 12:561 [Erratum: Plasma Sources Sci. Technol. 13:187 (2004)]
  • Dorai, R., and M. J. Kushner. 2003. A model for plasma modification of polypropylene using atmospheric pressure discharges. J. Phys. D 36:666.